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When calculating the production costs input data can vary considerably inquality between different cases. When costs pertain from products, which are already in production, complete and reliable data may already be available. For new products, new production systems or new production technology it might be hard to find applicable and reliable data. The cost and performance parameters needed can th

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A new mechanical scanner design for a high-speed atomic force microscope (AFM) is presented and discussed in terms of modeling and control. The positioning range of this scanner is 13 mum in the X- and Y-directions and 4.3 mum in the vertical direction. The lowest resonance frequency of this scanner is above 22 kHz. This paper is focused on the vertical direction of the scanner, being the crucial