Single-mode waveguides with SU-8 polymer core and cladding for MOEMS applications
Fabrication and optical characterization of single-mode polymeric embedded waveguides are performed. A specific material combination (SU-8 2005 as core and the modified SU-8 mr-L 6050XP as cladding) is chosen in order to obtain a small refractive index difference for single-mode propagation combined with the conventional fabrication method UV lithography to facilitate the integration of different
