Fabrication of cantilever chip with complementary micro channel system in SU-8 for biochemical detection
This thesis presents the works on fabrication and measurements done with micro cantilevers and a micro channel system, fabricated in the photo-resist SU-8. SU-8 is a polymer patterned by UV lithography which offers a cheap and fast processing and is an interesting alternative to standard Si techniques. For the structures intended here, it proved to be a well suited material and promising results w
